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Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions

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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,569 edits
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|-
|-
! A
! A
| SF<sub>6</sub>
| <span style="color:#FFFFFF; background:blue">SF<sub>6</sub> flow</span>
| DC
| DC voltage
| ±10V
| ± 10V
|-
|-
! B
! B
| SF<sub>6</sub>2.2
| <span style="background:red">C<sub>4</sub>F<sub>8</sub> flow</span>
| 1
| DC voltage
| ± 20V
|-
|-
! Pressure (mtorr)
! C
| 26
| <span style="background:lime">Pressure</span>
| 20
| DC voltage
| ± 10V
|-
|-
! Coil power (W)
! D
| 2500
| <span style="background:yellow">DC Bias</span>
| 2000
| DC voltage
| ± 2V
|-
|-
! Platen power (W)
! E
| 35
| <span style="color:#FFFFFF; background:purple">Platen Power</span>
| 0
| DC voltage
| ± 50V
|-
|-
! Common
! F
| colspan="2" | Temperature 0 degs
| <span style="background:silver">Reflected Platen Power</span>
| DC voltage
| ± 50V
|-
! G
| <span style="background:aqua">Coil Power</span>
| DC voltage
| ± 20V
|-
! H
| <span style="background:fuchsia">Reflected Coil Power</span>
| DC voltage
| ± 10V
|-
|-
|}
|}
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