Specific Process Knowledge/Thin film deposition/Deposition of Aluminium: Difference between revisions
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Aluminium may be sputter deposited in either Wordentec or the Lesker sputter system. | Aluminium may be sputter deposited in either Wordentec or the Lesker sputter system. | ||
*[[/Sputter rates for Al|Sputtering of Aluminium | *[[/Sputter rates for Al|Sputtering of Aluminium in Wordentec]] | ||
==E-beam evaporation of Aluminium== | ==E-beam evaporation of Aluminium== | ||