Specific Process Knowledge/Lithography/UVLithography: Difference between revisions
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Supplied by [https://www.microchemicals.com/ MicroChemicals GmbH] | Supplied by [https://www.microchemicals.com/ MicroChemicals GmbH] | ||
|Can be used for both positive and | |Can be used for both positive and image reversed (negative) processes with resist thickness between 1 and 4 µm. | ||
|[[media:AZ5214E.pdf|AZ5214E.pdf]] | |[[media:AZ5214E.pdf|AZ5214E.pdf]] | ||