Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions
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To get rid of the oscillations we must change from the Fixed pressure mode must to Fixed APC mode. Here, this is no feedback loop: In the transition between phases, the different gas flows, RF powers and APC setting will produce a different pressure that is reached without any overshooting. The price one may have to pay is that the new pressure may be reached at a slower speed. Also, with a pressure setting defined in terms of APC percentage in the recipe, the actual pressures during the process itself will have to be noted manually. | To get rid of the oscillations we must change from the Fixed pressure mode must to Fixed APC mode. Here, this is no feedback loop: In the transition between phases, the different gas flows, RF powers and APC setting will produce a different pressure that is reached without any overshooting. The price one may have to pay is that the new pressure may be reached at a slower speed. Also, with a pressure setting defined in terms of APC percentage in the recipe, the actual pressures during the process itself will have to be noted manually. | ||
=== New recipes=== | |||