Specific Process Knowledge/Lithography/Baking: Difference between revisions
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* closed lid @ 110°C:<br />Mean: 109.54°C<br />Uniformity error: 0.89%. | * closed lid @ 110°C:<br />Mean: 109.54°C<br />Uniformity error: 0.89%. | ||
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Hotplate 1:<br /> https://labmanager.dtu.dk/view_binary.php?type=data&mach=122 | Hotplate 1:<br /> https://labmanager.dtu.dk/view_binary.php?type=data&mach=122 | ||
Hotplate 2:<br /> https://labmanager.dtu.dk/view_binary.php?type=data&mach=124 | |||
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