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Specific Process Knowledge/Lithography/Baking: Difference between revisions

Jehem (talk | contribs)
Jehem (talk | contribs)
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* closed lid @ 110°C:<br />Mean: 109.54°C<br />Uniformity error: 0.89%.
* closed lid @ 110°C:<br />Mean: 109.54°C<br />Uniformity error: 0.89%.


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* Hotplate 1 @ 100°C:<br />Mean: 96.53°C<br />Uniformity error: 3.34%.
* Hotplate 2 @ 100°C:<br />Mean: 99.84°C<br />Uniformity error: 3.05%.
* Hotplate 3 @ 100°C:<br />Mean: 97.07°C<br />Uniformity error: 4.60%.
* Hotplate 4 @ 100°C:<br />Mean: 98.28°C<br />Uniformity error: 3.92%.
Hotplate 1:<br /> https://labmanager.dtu.dk/view_binary.php?type=data&mach=122  
Hotplate 1:<br /> https://labmanager.dtu.dk/view_binary.php?type=data&mach=122  
Hotplate 2:<br /> https://labmanager.dtu.dk/view_binary.php?type=data&mach=124


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