Specific Process Knowledge/Thin film deposition/ALD2 (PEALD): Difference between revisions
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[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=365 ALD 2 (PEALD) info page in LabManager] | [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=365 ALD 2 (PEALD) info page in LabManager] | ||
== Process information == | == Process information == | ||
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*[[/TiN deposition using ALD2| TiN deposition using '''ALD 2 (PEALD)''']] | *[[/TiN deposition using ALD2| TiN deposition using '''ALD 2 (PEALD)''']] | ||
==Equipment performance and process related parameters== | ==Equipment performance and process related parameters== | ||