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Specific Process Knowledge/Thermal Process/A3 Phosphor Drive-in furnace: Difference between revisions

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! QC Recipe:
! QC Recipe:
! Wet1050
! WET1050
! Dry1050
! DRY1050
|-  
|-  
| H<sub>2</sub> flow
| H<sub>2</sub> flow
Line 69: Line 69:
and over the boat)
and over the boat)
|-
|-
!Dry1050
!DRY1050
|110-116 nm
|110-116 nm
|3 %
|3 %
|-
|-
!Wet1050
!WET1050
|305-321 nm
|305-321 nm
|5 %
|5 %