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Specific Process Knowledge/Lithography/Baking: Difference between revisions

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Jehem (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
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Jehem (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
1,931 edits
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|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|- valign="top"
!QC
!QC
|- valign="top"
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Open lid @ 110°C: Mean 109.16°C, uniformity error 1.12%.
* Open lid @ 110°C:<br />Mean: 109.16°C<br />Uniformity error: 1.12%.
closed lid @ 110°C: Mean 109.54°C, uniformity error 0.89%.
* closed lid @ 110°C:<br />Mean: 109.54°C<br />Uniformity error: 0.89%.


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Comming soon.
* Hotplate 1 @ 100°C:<br />Mean: 96.53°C<br />Uniformity error: 3.34%.
* Hotplate 2 @ 100°C:<br />Mean: 99.84°C<br />Uniformity error: 3.05%.
* Hotplate 3 @ 100°C:<br />Mean: 97.07°C<br />Uniformity error: 4.60%.
* Hotplate 4 @ 100°C:<br />Mean: 98.28°C<br />Uniformity error: 3.92%.
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Comming soon.
 
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'''Spincoater: Gamma UV:'''
'''Spincoater: Gamma UV:'''


* TM16 @ 110°C: Mean 110.1°C, uniformity error 0.23%.
* TM16 @ 110°C:<br />Mean: 110.1°C<br />Uniformity error: 0.23%.
* TM15 @ 100°C: Mean 99.5°C, uniformity error 0.95%.
* TM15 @ 100°C:<br />Mean: 99.5°C<br />Uniformity error: 0.95%.
* TM14 @ 90°C: Mean 88.9°C, uniformity error 1.01%.
* TM14 @ 90°C:<br />Mean: 88.9°C<br />Uniformity error: 1.01%.
* TM13 @ 110°C: Mean 108.6°C, uniformity error 1.45%.
* TM13 @ 110°C:<br />Mean: 108.6°C<br />Uniformity error: 1.45%.




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'''Spincoater: Süss stepper:'''
'''Spincoater: Süss stepper:'''


* TM16 @ 175°C: Mean 174.4°C, uniformity error 0.72%.
* TM16 @ 175°C:<br />Mean: 174.4°C<br />Uniformity error: 0.72%.
* TM15 @ 175C: Mean 174.9°C, uniformity error 0.15%.
* TM15 @ 175C:<br />Mean: 174.9°C<br />Uniformity error: 0.15%.
* TM14 @ 130°C: Mean 129.8°C, uniformity error 0.23%.
* TM14 @ 130°C:<br />Mean: 129.8°C<br />Uniformity error: 0.23%.
* TM13 @ 130°C: Mean 129.7°C, uniformity error 0.20%.
* TM13 @ 130°C:<br />Mean: 129.7°C<br />Uniformity error: 0.20%.
* TM12 @ 23°C: Mean 22.9°C, uniformity error 0.46%.
* TM12 @ 23°C:<br />Mean: 22.9°C<br />Uniformity error: 0.46%.
* TM11 @ 23°C: Mean 22.8°C, uniformity error 0.46%.
* TM11 @ 23°C:<br />Mean: 22.8°C<br />Uniformity error: 0.46%.




'''Developer: Stepper:'''
'''Developer: Stepper:'''


* TM14 @ 130°C: Mean 129.9°C, uniformity error 0.62%.
* TM14 @ 130°C:<br />Mean: 129.9°C<br />Uniformity error: 0.62%.
* TM13 @ 130°C: Mean 130.1°C, uniformity error 0.73%.
* TM13 @ 130°C:<br />Mean: 130.1°C<br />Uniformity error: 0.73%.
* TM11 @ 20°C: Mean 20.2°C, uniformity error 0.10%.
* TM11 @ 20°C:<br />Mean: 20.2°C<br />Uniformity error: 0.10%.




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