Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions
| Line 75: | Line 75: | ||
=== Process D4 === | === Process D4 === | ||
After a few years in its original configuration, we decided to upgrade Pegasus 1 with the [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange|High flow plenum]] upgrade. | After a few years in its original configuration, we decided to upgrade Pegasus 1 with the [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange|High flow plenum]] upgrade to improve the fast switching performance. As a result, the original recipe Process D was changed to Process D4 with faster cycles. The process parameters are listed in the table below. | ||
{| {{table}} | {| {{table}} | ||
| Line 109: | Line 109: | ||
|- | |- | ||
|} | |} | ||
Running Process D4 while monitoring with the Pro software and Picoscope produces plots as shown below. | |||
<gallery caption="4 cycles of Process D4 " widths="400" heights="500" perrow="2"> | <gallery caption="4 cycles of Process D4 " widths="400" heights="500" perrow="2"> | ||
| Line 115: | Line 115: | ||
Image:PrD4 pico.png | Right: Recorded with the Picoscope | Image:PrD4 pico.png | Right: Recorded with the Picoscope | ||
</gallery> | </gallery> | ||