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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,569 edits
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== Improving the Bosch process by modifying the showerhead==
== Modification of the showerhead==
--[[User:jmli|jmli]] ([[User talk:jmli|talk]]) 20 November 2015‎  
--[[User:jmli|jmli]] ([[User talk:jmli|talk]]) 20 November 2015‎  


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Click [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange|HERE]] to see a comparison of some the etches before and after the change of the showerhead.
Click [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange|HERE]] to see a comparison of some the etches before and after the change of the showerhead.


== A closer look at the Bosch Process==
== A closer look at the Bosch Process==
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