Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions

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-When running any recipe on the SPTS Pro software, a set of process parameters are recorded (defined in the logging recipe that can be modified like any other recipe) as the process runs. This data can be accessed later by looking up the datalog. During the process itself, one can also activate the 'Trace' to monitor the process parameters in real time. To the left in the figure below, some of the most important process parameters are shown for a process run of the recipe Process A.
+When running any recipe on the SPTS Pro software, a set of process parameters are recorded as the process runs. This data can be accessed later by looking up the datalog. Which parameters are recorded is dictated by the socalled logging recipe that is selected for every process recipe. The list of possible parameters to include in a logging recipe is long and is comprised of both input parameters such as 'Coil forward power demand' and 'SF<sub>6</sub> flow setpoint', and measured values such as 'Platen temperature' and 'Platen DC Bias'. During the process itself, one can also activate the 'Trace' to monitor the process parameters in real time.
+To the left in the figure below, some of the most important process parameters are shown for a process run of the recipe Process A.
 <gallery caption="4 cycles of Process A " widths="400" heights="500" perrow="2">
 image:Process A SPTS.png | Left: Recorded with the SPTS software