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Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions

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VisualWikitext
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,580 edits
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,580 edits
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{| {{table}}
{| {{table}}
 
{| border="1" cellspacing="0" cellpadding="1"  align="center"
{| border="1" cellspacing="1" cellpadding="2"  align="center" style="width:500px"
! colspan="3" |Process A Step 2 parameters
! colspan="3" |Process A Step 2 parameters
|-
|-
! width="120" | Parameter   
! Parameter   
! width="120" | Etch
! Etch
! width="120" | Dep
! Dep
|-
|-
! Gas flow (sccm)  
! Gas flow (sccm)  
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