Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions
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= Process optimization using the Picoscope = | = Process optimization using the Picoscope = | ||
The Pegasus | The original standard recipes on Pegasus 1 differ in many ways. The second step of one of them is listed below: | ||
{| {{table}} | |||
{| border="1" cellspacing="1" cellpadding="2" align="center" style="width:500px" | |||
! colspan="3" |Process A parameters | |||
|- | |||
! colspan="2" | Step 2 | |||
|- | |||
! width="120" | Parameter | |||
! width="120" | Etch | |||
! width="120" | Dep | |||
|- | |||
! Gas flow (sccm) | |||
| SF<sub>6</sub> 350 (1.5 s) 550 | |||
| C<sub>4</sub>F<sub>8</sub> 200 | |||
|- | |||
! Cycle time (secs) | |||
| 7.0 | |||
| 4.0 | |||
|- | |||
! Pressure (mtorr) | |||
| 25 (1.5 s) 150 | |||
| 25 | |||
|- | |||
! Coil power (W) | |||
| 2800 | |||
| 2000 | |||
|- | |||
! Platen power (W) | |||
| 140 (1.5) 45 | |||
| 0 | |||
|- | |||
! Cycles | |||
| colspan="2" | 44 (vary this) | |||
|- | |||
! Common | |||
| colspan="2" | Temperature 20 degs, HBC 10 torr, Short funnel, with baffle & 5mm spacers | |||
|- | |||
|} | |||
<gallery caption="4 cycles of Process A " widths="400" heights="500" perrow="2"> | <gallery caption="4 cycles of Process A " widths="400" heights="500" perrow="2"> | ||