Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions
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The Pegasus tools were delivered with a set of standard recipes | The Pegasus tools were delivered with a set of standard recipes | ||
<gallery caption="4 cycles of Process A " widths=" | <gallery caption="4 cycles of Process A " widths="400" heights="500" perrow="2"> | ||
image:Process A SPTS.png | Recorded with the SPTS software | image:Process A SPTS.png | Recorded with the SPTS software | ||
image:Process A pico.png | Recorded with the Picoscope | image:Process A pico.png | Recorded with the Picoscope | ||