Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions
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The Pegasus tools were delivered with a set of standard recipes | The Pegasus tools were delivered with a set of standard recipes | ||
<gallery caption="4 cycles of Process A " widths="532" heights="620" perrow="2"> | |||
image:Process A SPTS.png | Recorded with the SPTS software | |||
image:Process A pico.png | Recorded with the Picoscope | |||
</gallery> | |||
<gallery caption="4 cycles of Process D4 " widths="532" heights="620" perrow="2"> | |||
Image:PrD4 SPTS.png | Recorded with the SPTS software | |||
Image:PrD4 pico.png |Recorded with the Picoscope | |||
</gallery> | |||
[[Image:PrD4 pico.png |frame|right|x500px|4 cycles of the recipe PrD4 recorded with the Picoscope]] | [[Image:PrD4 pico.png |frame|right|x500px|4 cycles of the recipe PrD4 recorded with the Picoscope]] | ||
Revision as of 11:39, 17 March 2020
Process optimization using the Picoscope
The Pegasus tools were delivered with a set of standard recipes
- 4 cycles of Process A
-
Recorded with the SPTS software -
Recorded with the Picoscope
- 4 cycles of Process D4
-
Recorded with the SPTS software -
Recorded with the Picoscope
