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Specific Process Knowledge/Thin film deposition/Deposition of Molybdenum: Difference between revisions

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Reet (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
1,760 edits
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|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
! Layer thickness
! Layer thickness
|10Å to 0.6 µm*
|10Å to 0.2 µm*
|10Å to 500 Å
|10Å to 500 Å
|-
|-
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'''*'''  ''If depositing more than 600 nm in total, write to metal@danchip.dtu.dk well in advance to ensure enough material is present.''
'''*'''  ''Depending on the amount of heating during Mo deposition, which we will discover during process development.''
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