Specific Process Knowledge/Lithography/Coaters/Spin Coater: Gamma UV processing: Difference between revisions
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{| border="1" cellspacing="2" cellpadding="2" colspan="3" | {| border="1" cellspacing="2" cellpadding="2" colspan="3" | ||
|bgcolor="#98FB98" |'''Quality Control (QC) for Spin Coater: Gamma UV - AZ nLOF 2020 | |bgcolor="#98FB98" |'''Quality Control (QC) for Spin Coater: Gamma UV - AZ nLOF 2020''' | ||
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{| border="1" cellspacing="2" cellpadding="2" colspan="3" | {| border="1" cellspacing="2" cellpadding="2" colspan="3" | ||
|bgcolor="#98FB98" |'''Quality Control (QC) for Spin Coater: Gamma UV - AZ 5214E | |bgcolor="#98FB98" |'''Quality Control (QC) for Spin Coater: Gamma UV - AZ 5214E''' | ||
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Spin-off speed will be adjusted if film thickness is outside the limit. | Spin-off speed will be adjusted if film thickness is outside the limit. | ||
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==HMDS priming== | ==HMDS priming== | ||