Specific Process Knowledge/Lithography/Coaters/Spin Coater: Gamma UV processing: Difference between revisions
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|4" wafer, with HMDS. 9 points on one wafer, exclusion zone 5mm | |4" wafer, with HMDS. 9 points on one wafer, exclusion zone 5mm | ||
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==AZ 5214E coating== | ==AZ 5214E coating== | ||