Specific Process Knowledge/Lithography/Coaters/Spin Coater: Gamma UV processing: Difference between revisions
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==AZ MiR 701 (29cps) coating== | ==AZ MiR 701 (29cps) coating== | ||
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|4" wafer, no HMDS. 9 points on one wafer, exclusion zone 5mm | |4" wafer, no HMDS. 9 points on one wafer, exclusion zone 5mm | ||
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==AZ nLOF 2020 coating== | ==AZ nLOF 2020 coating== | ||