Specific Process Knowledge/Lithography/Coaters/Spin Coater: Gamma UV processing: Difference between revisions
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=Standard Processes= | =Standard Processes= | ||
==HMDS priming== | ==HMDS priming== | ||
The standard HMDS priming process has been developed to mimic the behavior of the IMTEC Star2000 HMDS oven, which produces a contact angle of 81-82° on an oxidized silicon surface. The fast HMDS priming has been developed to have a process time of approximately one minute, in order to match the process time of typical coating and softbaking processes. | The standard HMDS priming process has been developed to mimic the behavior of the IMTEC Star2000 HMDS oven, which produces a contact angle of 81-82° on an oxidized silicon surface. The fast HMDS priming has been developed to have a process time of approximately one minute, in order to match the process time of typical coating and softbaking processes. | ||
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|average of nine measurements (three measurements on three different samples) | |average of nine measurements (three measurements on three different samples) | ||
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|average of three measurements on one sample | |average of three measurements on one sample | ||
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==AZ MiR 701 (29cps) coating== | ==AZ MiR 701 (29cps) coating== | ||