LabAdviser/Technology Research: Difference between revisions
No edit summary |
No edit summary |
||
| Line 39: | Line 39: | ||
==Completed Projects - Fabrication== | ==Completed Projects - Fabrication== | ||
*[[/Fabrication of Hyperbolic Metamaterials using Atomic Layer Deposition|Fabrication of Hyperbolic Metamaterials using Atomic Layer Deposition]] - ''initiated November 2013'' - Evgeniy Shkondin | |||
===Advanced Nanomachining=== | ===Advanced Nanomachining=== | ||
*[[/Technology Development of 3D Silicon Plasma Etching process for Novel Devices and Applications|Technology Development of 3D Silicon Plasma Etching process for Novel Devices and Applications]] - ''initiated November 2015'' - Bingdong Chang | *[[/Technology Development of 3D Silicon Plasma Etching process for Novel Devices and Applications|Technology Development of 3D Silicon Plasma Etching process for Novel Devices and Applications]] - ''initiated November 2015'' - Bingdong Chang | ||
Revision as of 15:27, 13 March 2020
Feedback to this page: click here
The aim of this page is to give an overview of the technology research going on in the cleanroom and the other laboratories facilitated by DTU Nanolab. Here technology research projects will be presented. This includes a project description and links to other pages in LabAdviser where the process development outcome from these projects can be found. We urge all our users that do technology research at these facilities to present their activities here. At DTU Nanolab we commit our selves to present the technology research that we initiate to share the outcome with our users, as this is the main purpose for this research.
Presentation Form for Presenting Technology Research:
If you perform technology research in the DTU Nanolab facilities, please contribute to this overview page. Start by contacting Berit Herstrøm.
Current Projects - Fabrication
Advanced Nanomachining
- Smoothed advanced silicon NEMS devices - initiated November 2017 - Vy Thi Hoang Nguyen
Biomaterial Microsystems
Polymer Microsystems
Silicon Microtechnology
- Microfabrication of X-ray optical elements - initiated February 2017 - Chantal Silvestre
Current Projects - Characterization
Nanostructure and Functionality
- Quantitative electron microscopy of 2D materials - initiated September 2018 - Anton Bay Andersen
Molecular Windows
Electron Matter Interactions
Soft Matter
Completed Projects
Completed Projects - Fabrication
- Fabrication of Hyperbolic Metamaterials using Atomic Layer Deposition - initiated November 2013 - Evgeniy Shkondin
Advanced Nanomachining
- Technology Development of 3D Silicon Plasma Etching process for Novel Devices and Applications - initiated November 2015 - Bingdong Chang
Biomaterial Microsystems
Polymer Microsystems
Silicon Microtechnology
- Nanofabrication of Inductive Components for Integrated Power Supply On Chip - initiated November 2014 Hoà Lê Thanh
- Microfabrication of Hard x-ray Lenses - initiated December 2012 - Frederik Stöhr
Current Projects - Characterization
Nanostructure and Functionality
- Nanoscale characterization of ultra-thin metal films for nanofabrication applications - initiated November 2014 - Matteo Todeschini
Molecular Windows
Electron Matter Interactions
- Organic Ice Resists for Electron-Beam Lithography - Instrumentation and Processes - initiated November 2014 - William Tiddi