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Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 03 processing: Difference between revisions

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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,528 edits
Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,528 edits
Line 62: Line 62:
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
| Quality
| Quality
| 200-220 mJ/cm<sup>2</sup>
| 180-200 mJ/cm<sup>2</sup>
| 0-1
| 0-1
| 1 µm
| 1 µm
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