Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 03 processing: Difference between revisions

@@ Line 118: / Line 118: @@
 '''Speed vs. dose:'''
-The writing speed remains almost constant up to a dose of 1000mJ/cm<sup>2</sup>. Due to the higher power of the 405nm laser, the writing speed remains high up to a dose of 2000mJ/cm<sup>2</sup> for this wavelength. After this point, the writing speed decreases almost linearly with dose. For 375nm, the writing speed is 50% at a dose of 4500mJ/cm<sup>2</sup>, while 405nm requires a dose of 8500mJ/cm<sup>2</sup> to drop to that speed.
+The writing speed of Aligner: Maskless 03 remains constant up to a dose of 500mJ/cm<sup>2</sup>. After this point, the writing speed decreases with increasing dose. The writing speed is 50% at a dose around 2000mJ/cm<sup>2</sup>.
 <br clear="all" />