Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions

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-This shows that using optical autofocus significantly increases the error on the flat measurement, while using pneumatic atuofocus performs similar to Aligner: Maskless 01. Initially, it was thus recommended to use pneumatic autofocus (or rely only on the alignment tool) for the first print if crystal alignment is important for subsequent processing. However, after the autofocus hardware and software upgrade in February 2020, the two methods yield equally good results.
+This shows that using optical autofocus (as installed) significantly increased the error on the flat measurement, while using pneumatic atuofocus performs similar to Aligner: Maskless 01. Initially, it was thus recommended to use pneumatic autofocus (or rely only on the alignment tool) for the first print if crystal alignment is important for subsequent processing. However, after the autofocus hardware and software upgrade in February 2020, the two methods yield equally good results.
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