Specific Process Knowledge/Thin film deposition/Deposition of Silver: Difference between revisions
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! E-beam evaporation (Alcatel) | ! E-beam evaporation (Alcatel) | ||
! E-beam evaporation (Leybold) | ! E-beam evaporation (Leybold) | ||
! Thermal | ! Thermal evaporation (Wordentec) | ||
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| Batch size | | Batch size | ||
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|RF Ar clean | |RF Ar clean | ||
|Ar ion bombartment | |Ar ion bombartment | ||
|Ar clean | |RF Ar clean | ||
|- | |- | ||
| Layer thickness | | Layer thickness | ||