LabAdviser/Technology Research/Microfabrication of X-ray optical elements: Difference between revisions
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:Optics Letters, 45,(2020), 1021-1024, [https://doi.org/10.1364/OL.381420] | :Optics Letters, 45,(2020), 1021-1024, [https://doi.org/10.1364/OL.381420] | ||
*;'''The CORE Sequence : A Nanoscale Fluorocarbon-Free Silicon Plasma Etch Process Based on SF6/O Cycles with Excellent 3D Profile Control at Room Temperature.''' | |||
:Nguyen H., T. V. , <u>Silvestre, C. M. </u>, Shi, P. , Cork, R., Jensen, F., Hubner, J., Ma, K., Leussink, P., De Boer, M., Jansen, H. | |||
: ECS J. Solid State Sci Technology, 9,(2020), 024002, [https://doi.org/10.1149/2162-8777/ab61ed] | |||
===Name of publication3 made in this project=== | ===Name of publication3 made in this project=== | ||