Specific Process Knowledge/Back-end processing/Hot Embosser: Difference between revisions
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*<nowiki>#</nowiki> 100 mm wafers | *<nowiki>#</nowiki> 100 mm wafers | ||
*<nowiki>#</nowiki> 150 mm wafers | *<nowiki>#</nowiki> 150 mm wafers | ||
*<nowiki>#</nowiki> 200 mm wafers | |||
*<nowiki>#</nowiki> odd sized samples, contact for the machine responsible personel | |||
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| style="background:LightGrey; color:black"|Allowed materials | | style="background:LightGrey; color:black"|Allowed materials | ||
Revision as of 11:34, 26 February 2020
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Name of equipment
Write a short description of the equipment(s).
The user manual(s), quality control procedure(s) and results, user APV(s), technical information and contact information can be found in LabManager:
Process information
Link to process pages - e.g. one page for each material
Example:
| Equipment | Equipment 1 | |
|---|---|---|
| Purpose |
| |
| Performance | Press Plates Temperature |
|
| Press Plates Pressure |
| |
| Process parameter range | Temperature |
|
| Pressure |
| |
| Substrates | Batch size |
|
| Allowed materials |
| |