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Specific Process Knowledge/Thermal Process/Oxidation: Difference between revisions

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image:Oxide_thickness_vs_time_Dry_oxygen_111.JPG|Dry oxide on <111> wafer. The y-axis is in Å and the x-axis is in minutes.  
image:Oxide_thickness_vs_time_Dry_oxygen_111.JPG|Dry oxide on <111> wafer. The y-axis is in Å and the x-axis is in minutes.  
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===Break-down voltage measurements===