Specific Process Knowledge/Characterization/Profiler: Difference between revisions
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[[image:Scanner without anotation.jpg|275x275px|right|thumb|Optical Profiler (Sensofar): positioned in the basement (346-904)]] | [[image:Scanner without anotation.jpg|275x275px|right|thumb|Optical Profiler (Sensofar): positioned in the basement (346-904)]] | ||
The Profilm3D optical profiler | The Profilm3D optical profiler from Filmetrics uses white-light-interferometry (WLI) and phase-shifting-interferometry (PSI) to produce surface profiles and depth-of-field color images. | ||
The main purpose is 3D topographic imaging of surfaces, step height measurements and roughness measurements with larger FOV (Field Of View) than the AFM, but less horisontal resolution. | The main purpose is 3D topographic imaging of surfaces, step height measurements and roughness measurements with larger FOV (Field Of View) than the AFM, but less horisontal resolution. | ||