Specific Process Knowledge/Characterization/Optical characterization: Difference between revisions
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==F10-RT reflectometer, transmitance, film thickness measurements [[Image:section under construction.jpg|70px]]== | ==F10-RT reflectometer, transmitance, film thickness measurements [[Image:section under construction.jpg|70px]]== | ||
[[image:F10-RT.JPG|275x275px|right|thumb|F10-RT: positioned in cleanroom E-6]] | [[image:F10-RT.JPG|275x275px|right|thumb|F10-RT: positioned in cleanroom E-6]] | ||
F10-RT is a combined | F10-RT is a combined reflectance and transmittance measurement system that can also use the reflectance measurements to get the film thickness of transparent thin films. This system combines fiber-optic spectrophotometry with material modeling software to provide an affordable tool for the measurement of reflectance, transmitance and film thickness. | ||
Reflectance and transmittance spectra can be obtained simultaneously. | |||
Normal incidence reflection data is collected and used to calculate thickness and index of refraction of the measured film. Absolute reflection data is obtained by comparing sample data to the measured reflection of a known reference sample. | Normal incidence reflection data is collected and used to calculate thickness and index of refraction of the measured film. Absolute reflection data is obtained by comparing sample data to the measured reflection of a known reference sample. | ||