Specific Process Knowledge/Lithography/Pretreatment: Difference between revisions
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==Spin Coater: Gamma UV== | ==Spin Coater: Gamma UV== | ||
[[Image:HMDS gammaUV.jpg|300x300px|thumb|HMDS module in Spin Coater: Gamma UV in E-5.]] | [[Image:HMDS gammaUV.jpg|300x300px|thumb|HMDS module in Spin Coater: Gamma UV in E-5.]] | ||
'''The user manual, user APV, and contact information can be found in LabManager:''' | |||
[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=359 Spincoater: Gamma UV labmanager page] | |||
'''Additional information about the spin coater and processes can be found in Labadviser:''' | |||
[http://labadviser.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Coaters#gamma_uv Spincoater: Gamma UV labadviser page] | |||
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==Spin Coater: Gamma e-beam & UV== | |||
[[image:Gamma_4M_-_E-beam_&_UV_full.JPG|300x300px|thumb|Spin Coater: Gamma e-beam & UV in E-5.]] | |||
'''The user manual, user APV, and contact information can be found in LabManager:''' | '''The user manual, user APV, and contact information can be found in LabManager:''' | ||