Specific Process Knowledge/Etch/Wet Platinum Etch: Difference between revisions
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Platinum can be etched by the following wet etch: | Platinum can be etched by the following wet etch: | ||
*HCl : HNO<sub>3</sub> : H<sub>2</sub>O (7 : 1 : 8) at 85 °C | *HCl : HNO<sub>3</sub> : H<sub>2</sub>O (7 : 1 : 8) at 85 °C (note: eacthes at 70 C 170nm etched in 5 min)* Nisoer July 2022 | ||
'''You have to be very careful when you work with this etch. It can generate nitrous oxides which are very toxic!!''' | '''You have to be very careful when you work with this etch. It can generate nitrous oxides which are very toxic!!''' | ||
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|-style="background:LightGrey; color:black" | |-style="background:LightGrey; color:black" | ||
!Process temperature | !Process temperature | ||
|85 °C | |85 °C etches at 70 C* Nisoer July 2022 | ||
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