Specific Process Knowledge/Imprinting: Difference between revisions
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A stamp for imprint lithography is usually made in Si or SiO, however other materials could also be used. | A stamp for imprint lithography is usually made in Si or SiO, however other materials could also be used. | ||
Here is a process flow for stamp made of SU8 resist. | Here is a process flow for stamp made of SU8 resist.[[media:Imrinting_layer_spinning.docx |Preparation substrate with imprint layer]] | ||
==Imprint resist== | ==Imprint resist== | ||