Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions

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	===Hardware changes===		===Hardware changes===

	A few hardware modifications have been made on the Pegasus since it was installed in 2010. The changes are listed in the table below under hardware options.		A few hardware modifications have been made on the Pegasus 1 since it was installed in 2010. The changes are listed in the table below under hardware options.