Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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|style="background:lightgrey; color:black"| | |style="background:lightgrey; color:black"| | ||
* Load lock | * Load lock | ||
|style="background:lightgrey; color:black" | |style="background:lightgrey; color:black" colspan="2"| | ||
* Vacuum cassette loader with two cassette stations and shared dealer chamber with Brooks robot | |||
* Vacuum cassette loader | |||
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| style="background:Whitesmoke; color:black"|Allowed materials | | style="background:Whitesmoke; color:black"|Allowed materials | ||