Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBE blazed gratings: Difference between revisions
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*360nm KRF resist | *360nm KRF resist | ||
''by bge@ | ''by bge@nanolab'' experiments made in June/July 2012 | ||
<gallery caption="Some examples of blazed gratings in fused silica etched with Cr and DUV resist as masking layer " widths="300px" heights="250px"> | <gallery caption="Some examples of blazed gratings in fused silica etched with Cr and DUV resist as masking layer " widths="300px" heights="250px"> | ||