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Specific Process Knowledge/Thin film deposition/ALD Picosun R200/ALD multilayers: Difference between revisions

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===Investigation of chemical composition in multilayers system===
===Investigation of chemical composition in multilayers system===


Chemical tace analysis has been performed using [[Specific_Process_Knowledge/Characterization/XPS#XPS-ThermoScientific|XPS-ThermoScientific]] equipment in depth profile mode.
Chemical tace analysis has been performed using [[Specific_Process_Knowledge/Characterization/XPS/K-Alpha|XPS K-Alpha]] equipment in depth profile mode.


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<gallery caption="" widths="1000px" heights="1000px" perrow="1">
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