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Specific Process Knowledge/Etch/ICP Metal Etcher/silicon oxide: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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*[[/By Peixiong|Tests done by Peixiong]]
*[[/By Peixiong|Tests done by Peixiong]]
*[[/By BGHE|Tests done by Berit]]
*[[/By BGHE|Tests done by Berit]]
*Test by Zhibo Li @Danchip ''dec. 2016'' - based on the work of Peixiong and Berit: [[:File:Zhibo Li SiO2 ICP etch (dose205).docx]]
*Test by Zhibo Li @nanolab ''dec. 2016'' - based on the work of Peixiong and Berit: [[:File:Zhibo Li SiO2 ICP etch (dose205).docx]]
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