Specific Process Knowledge/Etch/DryEtchProcessing/Comparison: Difference between revisions
| Line 172: | Line 172: | ||
* Coil generator | * Coil generator | ||
* Platen generator | * Platen generator | ||
| style="background:WhiteSmoke; color:black" colspan=" | | style="background:WhiteSmoke; color:black" colspan="4"| | ||
* Coil generator | * Coil generator | ||
* Platen generator | * Platen generator | ||
| Line 194: | Line 194: | ||
| style="background:lightgrey; color:black" | Loading via dedicated two-slot carousel load lock or via atmospheric cassette loader | | style="background:lightgrey; color:black" | Loading via dedicated two-slot carousel load lock or via atmospheric cassette loader | ||
| style="background:lightgrey; color:black" | Loading via dedicated two-slot carousel load lock | | style="background:lightgrey; color:black" | Loading via dedicated two-slot carousel load lock | ||
| style="background:lightgrey; color:black" colspan="2"| Loading via two cassette loading stations pumped down at vacuum | |||
| style="background:lightgrey; color:black" | Loading via dedicated two-slot carousel load lock | | style="background:lightgrey; color:black" | Loading via dedicated two-slot carousel load lock | ||
| style="background:lightgrey; color:black" | Manual loading directly into process chamber | | style="background:lightgrey; color:black" | Manual loading directly into process chamber | ||
| Line 209: | Line 210: | ||
* SOI option | * SOI option | ||
* Claritas endpoint detection | * Claritas endpoint detection | ||
| style="background:WhiteSmoke; color:black"| | |||
* Bosch multiplexing | |||
* Parameter ramping | |||
* SOI options | |||
| style="background:WhiteSmoke; color:black" | | | style="background:WhiteSmoke; color:black" | | ||
* Bosch multiplexing | * Bosch multiplexing | ||