Specific Process Knowledge/Etch/DryEtchProcessing/Comparison: Difference between revisions
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! style="background:silver; color:black"| [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegasus-1|Pegasus 1]] | ! style="background:silver; color:black"| [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegasus-1|Pegasus 1]] | ||
! style="background:silver; color:black"| [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegasus-2|Pegasus 2]] | ! style="background:silver; color:black"| [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegasus-2|Pegasus 2]] | ||
! style="background:silver; color:black"| [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegasus- | ! style="background:silver; color:black"| [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegasus-3|Pegasus 3]] | ||
! style="background:silver; color:black"| [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegasus- | ! style="background:silver; color:black"| [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegasus-4|Pegasus 4]] | ||
|- valign="top" | |- valign="top" | ||
! rowspan="2" style="background:silver; color:black" |Purpose | ! rowspan="2" style="background:silver; color:black" |Purpose | ||
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| style="background:lightgrey; color:black" | Backup silicon etcher | | style="background:lightgrey; color:black" | Backup silicon etcher | ||
| style="background:lightgrey; color:black" | | | style="background:lightgrey; color:black" | | ||
| style="background:lightgrey; color:black" colspan="2" | | | style="background:lightgrey; color:black" | Barc etch | ||
| style="background:lightgrey; color:black" | | |||
| style="background:lightgrey; color:black" colspan="2"| | |||
| style="background:lightgrey; color:black" | Silicon etcher | | style="background:lightgrey; color:black" | Silicon etcher | ||
| style="background:lightgrey; color:black" | | | style="background:lightgrey; color:black" | | ||