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Jiurban (talk | contribs)
NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891, NLAB-Nlab347-labadviser-users-35231
54 edits
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Descum of AZ  Mir 701 resist on 100mm silicon wafer. Five wafers were placed vertically in chamber.
Descum of AZ  Mir 701 resist on 100mm silicon wafer. Five wafers were placed vertically in chamber.


Flow of O2 was 100
Experiment parameters
{| {{table}}
| align="center" |
{| border="1" cellspacing="1" cellpadding="2"  align="center"
|- style="background:LightGrey"
|O2 flow|| N2 flow || Power
|-
| 100 || 100 || 150
|-
|}
 
 
{| {{table}}
{| {{table}}
| align="center" |  
| align="center" |  
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