Specific Process Knowledge/Lithography/Descum: Difference between revisions
| Line 71: | Line 71: | ||
| align="center" | | | align="center" | | ||
{| border="1" cellspacing="1" cellpadding="2" align="center" | {| border="1" cellspacing="1" cellpadding="2" align="center" | ||
! colspan=" | ! colspan="13" | Etched Thickness (nm) | ||
|- | |- | ||
! colspan="6" | ashing time (min) | ! colspan="6" | ashing time (min) | ||
|- style="background:LightGrey" | |- style="background:LightGrey" | ||