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Specific Process Knowledge/Etch/III-V ICP/InP-InGaAsP-InGaAs: Difference between revisions

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=== InP etch with Cl2/H2 and a Si carrier wafer==
=== InP etch with Cl2/H2 and a Si carrier wafer===
{| border="1" cellspacing="2" cellpadding="3"  
{| border="1" cellspacing="2" cellpadding="3"  
|'''Recipe name'''
|'''Recipe name'''
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