Specific Process Knowledge/Characterization/Optical characterization: Difference between revisions
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[[Category: Equipment |Characterization Optical]] | [[Category: Equipment |Characterization Optical]] | ||
[[Category: Characterization|Optical]] | [[Category: Characterization|Optical]] | ||
==Comparison of the two methods== | |||
For comparison of the three methods, see here: [[Specific Process Knowledge/Characterization/Measurement of film thickness and optical constants#Film_thickness_and_optical_constants_of_optical_transparent_films|Film thickness and optical constants of optical transparent films]] | |||
==Ellipsometer VASE and Ellipsometer M-2000V == | ==Ellipsometer VASE and Ellipsometer M-2000V == | ||
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