Specific Process Knowledge/Etch/III-V ICP/InP-InGaAsP-InGaAs: Difference between revisions
| Line 42: | Line 42: | ||
|Sidewall angle | |Sidewall angle | ||
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85-87 <sup>o</sup> (bottom)<br> | 85-87<sup>o</sup> (bottom)<br> | ||
93-95 <sup>o</sup> (top)<br> | 93-95<sup>o</sup> (top)<br> | ||
Concave profile | Concave profile | ||
|- | |- | ||