Specific Process Knowledge/Thermal Process/Oxidation/Standard oxidation recipes: Difference between revisions
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''Message: "Unload wafers"'' | ''Message: "Unload wafers"'' | ||
When the furnace is open, the | When the furnace is open, the wafers can be unloaded. | ||
Place the boat on the quartz plate in front of the furnace to unload the wafers. And be aware of, that the wafers are very hot, so they have to cool down for a few minutes, before they are removed from the boat. | Place the boat on the quartz plate in front of the furnace to unload the wafers. And be aware of, that the wafers are very hot, so they have to cool down for a few minutes, before they are removed from the boat. | ||