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Specific Process Knowledge/Thermal Process/Oxidation/Standard oxidation recipes: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Pevo (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
2,329 edits
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''Message: "Unload wafers"''
''Message: "Unload wafers"''


The user has to press "Start" (on the touch screen) or "Continue" (on the furnace computer) to close the furnace 
The recipe is paused, until the user presses "Start" (on the touch screen) or "Continue" (on the furnace computer). 




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When the furnace is open, the wafer can be unloaded.
When the furnace is open, the wafer can be unloaded.
Be aware of, that the wafers are very hot, so they have to cool down for about five minutes
 
Place the boat on the quartz plate in front of the furnace to unload the wafers. And be aware of, that the wafers are very hot, so they have to cool down for a few minutes, before they are removed from the boat.


When the wafers are unloaded, the user has to press "Start" (on the touch screen) or "Continue" (on the furnace computer) to close the furnace.
When the wafers are unloaded, the user has to press "Start" (on the touch screen) or "Continue" (on the furnace computer) to close the furnace.
The recipe then jumps to the STANDBY step, and the user can leave the furnace, after it has closed.   
The recipe then jumps to the STANDBY step, and the user can leave the furnace, after it has closed.   


If a recipe is aborted
 




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