Specific Process Knowledge/Thermal Process/Oxidation/Standard oxidation recipes: Difference between revisions
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The wet oxidation recipes in the A-stack, C1 and C3 furnaces are very similar. | The wet oxidation recipes in the A-stack, C1 and C3 furnaces are very similar. | ||
However, there are a few differences in recipes, because water vapour can be generated by either a torch, a steamer or a bubbler. More information can be found on each furnace page. | |||
Wet oxidation of III-V sample in the C2 furnace is described here: | Wet oxidation of III-V sample in the C2 furnace is described here: | ||
http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/Oxidation/Oxidation_on_III-V_oxidation_furnace_(C2) | http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/Oxidation/Oxidation_on_III-V_oxidation_furnace_(C2) | ||
===General recipe remarks:=== | ===General recipe remarks:=== | ||