Specific Process Knowledge/Thermal Process/Oxidation/Standard oxidation recipes: Difference between revisions
| Line 67: | Line 67: | ||
The furnace is kept closed and clean: | The furnace is kept closed and clean: | ||
* Standby temperature: 700 C | * Standby temperature: 700 <sup>o</sup>C | ||
* | * N<sub>2</sub> flow: 3 SLM | ||
* | * O<sub>2</sub> flow: 0 SLM | ||
The user has to press "Start" (on the touch screen or furnace computer) to start the recipe. | The user has to press "Start" (on the touch screen or furnace computer) to start the recipe. | ||
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The user has to press "Start" (on the touch screen) or "Continue" (on the furnace computer) to close the furnace. | The user has to press "Start" (on the touch screen) or "Continue" (on the furnace computer) to close the furnace. | ||
'''04 CLOSE''' | '''04 CLOSE''' | ||
| Line 100: | Line 101: | ||
''Message: "Boat moving"'' | ''Message: "Boat moving"'' | ||
The furnace is closing | The furnace is closing. | ||
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''Message: "Heat-up"'' | ''Message: "Heat-up"'' | ||
The furnace is heating up to the temperature defined in the recipe | The furnace is heating up to the temperature defined in the recipe (usually 800-1150 <sup>o</sup>C. | ||
The recipe will continue to the next step, when the temperature of center heating zone (zone 2) | |||
The recipe will continue to the next step, when the temperature of center heating zone (zone 2) reaches the right temperature. | |||