Specific Process Knowledge/Etch/DryEtchProcessing/Comparison: Difference between revisions
| Line 112: | Line 112: | ||
| Cl<sub>2</sub> | | Cl<sub>2</sub> | ||
| HBr | | HBr | ||
|} | |} | ||
| style="background:lightgrey; color:black" | | | style="background:lightgrey; color:black" | | ||
| Line 137: | Line 136: | ||
| BCl<sub>3</sub> | | BCl<sub>3</sub> | ||
| Cl<sub>2</sub> | | Cl<sub>2</sub> | ||
|N<sub>2</sub> | |||
|} | |} | ||
| style="background:lightgrey; color:black" | | | style="background:lightgrey; color:black" | | ||